How good ASML as an investment?

I am just aware of ASML’s dominance in EUV lithography. Looking to start long term (5-10 years) investment in this sector. Here is ASML with its peers from return and growth perspective: Return: 1 yr - 3 yrs - 5 yrs ASML: 94% - 233% - 668% AMAT: 131% - 191% - 527% LRCX: 106% - 279% - 739% Growth: 1 yr - 3 yrs (CAGR) - 5 yrs (CAGR) ASML: 32% - 20% - 22% AMAT: 28% - 6% - 16% LRCX: 38% - 9% - 18% As can be seen, returns far outpaced growth trend. For coming decades, more and more chips will be integrated with our day-to-life, and they need a provider to build. As I'm not any domain expert, my only concern is growth in leading edge process (currently 5 nm) compared where ASML dominates. Any thoughts?